Extreme ultraviolet (EUV) lithography is an integral part of modern semiconductor manufacturing, and scientists just found a way to make it more environmentally friendly. This process consumes a large amount of hydrogen, almost 600 liters per minute. However, thanks to a new process, around 70-80% of this hydrogen can be recovered.
Engineers from Edwards, an England-based vacuum systems firm, have found a way to reduce the hydrogen wastage associated with EUV lithography. Hydrogen is used in the system to sweep away any contaminants in the process, and all of it is burned away to create water at the end of the process.
Due to the amount of contaminants in the gas, it cannot be reused. With the Edwards hydrogen recovery system, which is “similar to a fuel cell in reverse”, manufacturers can now clean the hydrogen, allowing it to be reused. The system works by pushing a mixture of the dirty hydrogen, moisture, and nitrogen and ionising it, then pushing the mixture through a proton-exchange membrane.
After the mixture passes through the membrane, the hydrogen recombines, and is then cleaned to remove residual water. The contaminants remain in the system, which can be cleared for later use. This will curtail some of the environmental impact of semiconductor manufacturing.
This undertaking comes at a time where many chip fabrication units have expressed a desire to cut down on their carbon footprint. Late last year, Intel, GlobalFoundries, Micron, Samsung, TSMC, and more founded a consortium called the Semiconductor Climate Consortium. This undertaking aims to reduce emissions throughout the supply chain, with many companies working together to do so.
The semiconductor industry is estimated to cause around 3% of global emissions, making it a prime target for companies wishing to reach their net zero goals. With the rise of technology to make the process greener, it seems like Edwards’ hydrogen recovery will result in a step forward for the ecosystem as a whole.
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